Invention Grant
- Patent Title: Method and assembly for chromatic confocal spectral interferometry or spectral domain oct
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Application No.: US16770556Application Date: 2017-12-18
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Publication No.: US11248900B2Publication Date: 2022-02-15
- Inventor: Klaus Körner , Daniel Claus , Alois Herkommer , Christof Pruss
- Applicant: Universitat Stuttgart
- Applicant Address: DE Stuttgart
- Assignee: Universitat Stuttgart
- Current Assignee: Universitat Stuttgart
- Current Assignee Address: DE Stuttgart
- Agency: Shook, Hardy & Bacon L.L.P.
- International Application: PCT/EP2017/083255 WO 20171218
- International Announcement: WO2019/120470 WO 20190627
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
The present invention relates to a method and an assembly for chromatic confocal spectral interferometery, in particular also for spectral domain OCT (SD-OCT) using multi-spectral light. A multiple (e.g. two, three, four, etc.) axial splitting of foci in the interferometric object arm is performed using a multifocal (e.g. bifocal, trifocal, quattro-focal, etc.) optical component, forming thereby at least two, three or even several groups of chromatically split foci in the depth direction. The multifocal optical component is made of a diffractive optical element (712) and a Schwarzschild objective (5). At least two, three, four or even more differently colored foci of different groups of foci coincide in at least one confocal point in the object space of the setup. Thus, at least two, three or even more spectral wavelets are formed in the case of optical scanning of an object measurement point and spectral detection in the wavenumber domain, which wavelets are at least slightly spectrally separated from each other. This results in a significant increase in the optical primary data in the wavenumber domain and reduces the trade-off of the chromatic confocal spectral interferometry between axial measurement range and depth resolution. From the detected data, it is possible to calculate tan (alpha) as the quotient of the absolute phase shift delta_phi and the associated wavenumber difference delta_k, the Fourier transform over the spectral data, in order to respectively determine the optical path difference.
Public/Granted literature
- US20200378743A1 METHOD AND ASSEMBLY FOR CHROMATIC CONFOCAL SPECTRAL INTERFEROMETRY OR SPECTRAL DOMAIN OCT Public/Granted day:2020-12-03
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