Invention Grant
- Patent Title: High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz bessel beam
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Application No.: US17137881Application Date: 2020-12-30
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Publication No.: US11248960B2Publication Date: 2022-02-15
- Inventor: Gyeong-Sik Ok , Sung-Wook Choi , Hyun-Joo Chang
- Applicant: KOREA FOOD RESEARCH INSTITUTE
- Applicant Address: KR Jeollabuk-do
- Assignee: KOREA FOOD RESEARCH INSTITUTE
- Current Assignee: KOREA FOOD RESEARCH INSTITUTE
- Current Assignee Address: KR Jeollabuk-do
- Agency: Finch & Maloney, PLLC
- Agent Michael Bujold; Jay Franklin
- Priority: KR10-2016-0144573 20161101,KR10-2016-0144582 20161101,KR10-2016-0156244 20161123
- Main IPC: G01J3/42
- IPC: G01J3/42 ; G01V8/10 ; G01N21/3581 ; G02B5/00 ; G01V8/14 ; G01V8/18
Abstract:
A high resolution inspection apparatus using a terahertz Bessel beam. The high resolution inspection apparatus comprises a terahertz wave generating unit for generating a terahertz wave; a Bessel beam forming unit for generating a terahertz Bessel beam using the terahertz wave incident from the terahertz wave generating unit; a ring beam forming unit for forming a ring beam using the terahertz Bessel beam and concentrating the formed ring beam to an inspection target object; a scattered light detecting unit for detecting scattered light generated from the inspection target object; and a ring beam detecting unit for detecting a ring beam transmitted through the inspection target object.
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