Device for inspecting large area high speed object

    公开(公告)号:US11635377B2

    公开(公告)日:2023-04-25

    申请号:US16759374

    申请日:2018-02-09

    Abstract: A high-speed device, for inspecting a large area of an object, which includes: a terahertz wave generation portion configured to generate a terahertz wave; a ring beam forming portion configured to form a ring beam by using the terahertz wave incident from the terahertz wave generation portion; a rotary mirror configured to reflect the ring beam formed by the ring beam forming portion while rotating to allow the ring beam to be incident on an inspection target object; and a detector configured to detect a ring beam generated from the inspection target object.

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