Invention Grant
- Patent Title: Vibration isolation system and lithographic apparatus
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Application No.: US16636357Application Date: 2018-07-02
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Publication No.: US11249403B2Publication Date: 2022-02-15
- Inventor: Franciscus Maria Joannes Linssen , Hubertus Renier Maria Van Lierop
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pilisbury Winthrop Shaw Pittman LLP
- Priority: EP17185209 20170808
- International Application: PCT/EP2018/067757 WO 20180702
- International Announcement: WO2019/029908 WO 20190214
- Main IPC: G03F7/20
- IPC: G03F7/20 ; F16F15/027

Abstract:
A vibration isolation system including a support, a forward actuator and a return device. The support is for supporting the body on a base. The support has a body engaging surface and a base engaging surface. The base engaging surface is arranged to couple to the base. The support couples the body engaging surface to the body in a coupled state. The support uncouples the body engaging surface from the body in an uncoupled state. The forward actuator moves the body and the body engaging surface together relatively to the base in a first direction from a first initial position to an end position in the coupled state. The return device is configured to move the body engaging surface relatively to the body opposite to the first direction from the end position to a second initial position in the uncoupled state.
Public/Granted literature
- US20210181639A1 VIBRATION ISOLATION SYSTEM AND LITHOGRAPHIC APPARATUS Public/Granted day:2021-06-17
Information query
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