Invention Grant
- Patent Title: Aluminum nitride combined overtone resonators for the mmWave spectrum
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Application No.: US17069331Application Date: 2020-10-13
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Publication No.: US11258423B2Publication Date: 2022-02-22
- Inventor: Matteo Rinaldi , Guofeng Chen
- Applicant: Northeastern University
- Applicant Address: US MA Boston
- Assignee: Northeastern University
- Current Assignee: Northeastern University
- Current Assignee Address: US MA Boston
- Agency: Verrill Dana, LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/64 ; H03H9/46

Abstract:
A resonator system is provided in which a combined overtone resonator device is excited with a two-dimensional mode of mechanical vibration in a cross sectional plane of a piezoelectric plate in response to an alternating voltage applied through an interdigitated electrode. The cross sectional plane extends along the width direction and the thickness direction, and the two-dimensional mode of mechanical vibration is a two-dimensional combined overtone mode of second and third order asymmetrical Lamb-wave overtones.
Public/Granted literature
- US20210111696A1 Aluminum Nitride Combined Overtone Resonators for the mmWave Spectrum Public/Granted day:2021-04-15
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