Aluminum nitride combined overtone resonators for the mmWave spectrum

    公开(公告)号:US11258423B2

    公开(公告)日:2022-02-22

    申请号:US17069331

    申请日:2020-10-13

    Abstract: A resonator system is provided in which a combined overtone resonator device is excited with a two-dimensional mode of mechanical vibration in a cross sectional plane of a piezoelectric plate in response to an alternating voltage applied through an interdigitated electrode. The cross sectional plane extends along the width direction and the thickness direction, and the two-dimensional mode of mechanical vibration is a two-dimensional combined overtone mode of second and third order asymmetrical Lamb-wave overtones.

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