Invention Grant
- Patent Title: Injector for batch processing and methods of use
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Application No.: US15184617Application Date: 2016-06-16
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Publication No.: US11261525B2Publication Date: 2022-03-01
- Inventor: Joseph Yudovsky , Kevin Griffin , Mandyam Sriram
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: C23C16/455
- IPC: C23C16/455
Abstract:
Apparatus and methods for processing a substrate including an injector unit, comprising a leading reactive gas port extending along a length of the injector unit, a trailing reactive gas port extending along the length of the injector unit, and a merge vacuum port forming a boundary around and enclosing the leading reactive gas port and the trailing reactive gas port.
Public/Granted literature
- US20160369398A1 Injector For Batch Processing And Methods Of Use Public/Granted day:2016-12-22
Information query
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