Invention Grant
- Patent Title: Complementary metal-oxide semiconductor compatible patterning of superconducting nanowire single-photon detectors
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Application No.: US16848662Application Date: 2020-04-14
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Publication No.: US11271125B2Publication Date: 2022-03-08
- Inventor: Faraz Najafi , Mark Thompson , Damien Bonneau , Joaquin Matres Abril
- Applicant: PSIQUANTUM CORP.
- Applicant Address: US CA Palo Alto
- Assignee: PSIQUANTUM CORP.
- Current Assignee: PSIQUANTUM CORP.
- Current Assignee Address: US CA Palo Alto
- Agency: Morgan, Lewis & Bockius LLP
- Main IPC: H01L31/0352
- IPC: H01L31/0352 ; H01L31/18 ; H01L31/0232 ; H01L31/109 ; H01L39/24 ; G01J1/42 ; H01L39/10 ; G01J1/44

Abstract:
A device includes a first semiconductor layer; a portion of a second semiconductor layer disposed on the first semiconductor layer; and a third semiconductor layer including a first region disposed on the portion of the second semiconductor layer and a second region disposed on the first semiconductor layer. A thickness of the first region is less than a predefined thickness. The device also includes an etch stop layer disposed on the third semiconductor layer; a plurality of distinct portions of a fourth semiconductor layer disposed on the etch stop layer and exposing one or more distinct portions of the etch stop layer over the portion of the second semiconductor layer; and a plurality of distinct portions of a superconducting layer disposed on the plurality of distinct portions of the fourth semiconductor layer and the exposed one or more distinct portions of the etch stop layer.
Public/Granted literature
Information query
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