Invention Grant
- Patent Title: Vaporizer
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Application No.: US17058616Application Date: 2019-04-22
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Publication No.: US11274367B2Publication Date: 2022-03-15
- Inventor: Hirofumi Ono , Shigeo Yagi , Kenta Yamamoto
- Applicant: LINTEC CO., LTD.
- Applicant Address: JP Shiga
- Assignee: LINTEC CO., LTD.
- Current Assignee: LINTEC CO., LTD.
- Current Assignee Address: JP Shiga
- Agency: Lucas & Mercanti, LLP
- Priority: JPJP2018-138837 20180724,JPJP2019-076185 20190412
- International Application: PCT/JP2019/016959 WO 20190422
- International Announcement: WO2020/021796 WO 20200130
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/448 ; B01B1/00 ; B01J7/02 ; B05B1/24

Abstract:
Provided is a vaporizer capable of reducing the occurrence of bumping in a vaporization space and thereby minimizing the pressure fluctuations therein, when a method not using an atomizer is employed. A vaporizer (1) includes a tank body (10), a porous member (30) disposed in the vaporizer (1) and heated, a supply tube (40) configured to supply a liquid material (L) to the porous member (30), and a gas discharge passage (7) configured to discharge a source gas (G) produced by vaporizing the liquid material (L) to the outside. An outlet (41) of the supply tube (40) is disposed in contact with or in close proximity to the porous member (30). When the outlet (41) is disposed in close proximity to the porous member (30), a separation distance (H) between the outlet (41) and the porous member (30) is not greater than a distance from the outlet (41) to a bottom of a droplet of the liquid material (L) formed and suspended at the outlet (41) by surface tension.
Public/Granted literature
- US20210207266A1 VAPORIZER Public/Granted day:2021-07-08
Information query
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