公开(公告)号：US11867317B1

公开(公告)日：2024-01-09

申请号：US18547602

申请日：2021-10-26

Applicant: LINTEC CO., LTD.

Inventor： Hirofumi Ono ,  Kenta Yamamoto

IPC: F16K7/14 ,  F16K31/00 ,  H10N30/88 ,  H10N30/02

CPC classification number: F16K7/14 ,  F16K31/004 ,  H10N30/02 ,  H10N30/88

Abstract: A flow rate control valve includes a base block and a valve opening/closing mechanism. The base block is provided with a valve chamber in which a valve seat through which a liquid raw material L flows, and a diaphragm that is brought into contact with or separated from the valve seat so as to close/open the valve seat are installed. The valve opening/closing mechanism includes a slide bearing part, a support post part, a piezoelectric actuator part, and a valve-actuating part. The slide bearing part is installed on the base block 1 and is provided with a bearing. The support post part includes a support post that is inserted slidably in the bearing and that moves upward and downward in a diaphragm direction.

公开(公告)号：US11274367B2

公开(公告)日：2022-03-15

申请号：US17058616

申请日：2019-04-22

Applicant: LINTEC CO., LTD.

Inventor： Hirofumi Ono ,  Shigeo Yagi ,  Kenta Yamamoto

IPC: C23C16/44 ,  C23C16/448 ,  B01B1/00 ,  B01J7/02 ,  B05B1/24

Abstract: Provided is a vaporizer capable of reducing the occurrence of bumping in a vaporization space and thereby minimizing the pressure fluctuations therein, when a method not using an atomizer is employed. A vaporizer (1) includes a tank body (10), a porous member (30) disposed in the vaporizer (1) and heated, a supply tube (40) configured to supply a liquid material (L) to the porous member (30), and a gas discharge passage (7) configured to discharge a source gas (G) produced by vaporizing the liquid material (L) to the outside. An outlet (41) of the supply tube (40) is disposed in contact with or in close proximity to the porous member (30). When the outlet (41) is disposed in close proximity to the porous member (30), a separation distance (H) between the outlet (41) and the porous member (30) is not greater than a distance from the outlet (41) to a bottom of a droplet of the liquid material (L) formed and suspended at the outlet (41) by surface tension.