Invention Grant
- Patent Title: Electromechanical pressure sensor
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Application No.: US16625521Application Date: 2018-06-15
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Publication No.: US11274983B2Publication Date: 2022-03-15
- Inventor: Amal Hajjaj , Md Abdullah Al Hafiz , Mohammad Ibrahim Younis
- Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Applicant Address: SA Thuwal
- Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: SA Thuwal
- Agency: Patent Portfolio Builders PLLC
- International Application: PCT/IB2018/054430 WO 20180615
- International Announcement: WO2019/021073 WO 20190131
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L19/00

Abstract:
An electromechanical pressure sensor includes an electromechanical resonator having a driving electrode, a sensing electrode, and a beam resonator arranged between the driving and sensing electrodes. The beam resonator includes a resonator beam coupled on a first end to a first fixed anchor and coupled on a second end to a fixed second fixed anchor. The electromechanical resonator also includes a first voltage source coupled to the driving electrode and configured to provide an alternating current to the driving electrode and a second voltage source coupled to the first fixed anchor. The second voltage source provides a DC bias to the resonator beam. The electromechanical resonator further includes a third voltage source coupled to the resonator beam via the first and second fixed anchors. The third voltage source is configured to supply a voltage to the resonator beam that results in a temperature differential between the resonator beam and the first and second fixed anchors. The electromechanical resonator also includes a processor coupled to the sensing electrode and configured to correlate a voltage on the sensing electrode with a pressure value.
Public/Granted literature
- US20210140841A1 ELECTROMECHANICAL PRESSURE SENSOR Public/Granted day:2021-05-13
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