Invention Grant
- Patent Title: Method for image adjustment and charged particle beam system
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Application No.: US16951472Application Date: 2020-11-18
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Publication No.: US11276552B2Publication Date: 2022-03-15
- Inventor: Yuki Tomizawa , Kazunari Asao , Kazuyuki Hirao
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Tech Corporation
- Current Assignee: Hitachi High-Tech Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JPJP2019-224714 20191212
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/21 ; H01J37/28 ; G06T5/00 ; H01J37/285

Abstract:
There are provided: a method for image adjustment using a charged particle beam device, and a charged particle beam system, capable of appropriately adjusting a contrast and brightness as well as a focus for a measurement region present in a deep portion of a sample even when a depth of the measurement region is unknown.
A method for image adjustment performed by a computer system controlling a charged particle beam device includes: by the computer system, specifying a measurement region from a captured image of a sample; performing centering processing based on the specified measurement region; extracting the measurement region in a field of view that has undergone the centering processing or the image that has undergone the centering processing; adjusting a contrast and brightness for the extracted measurement region; and adjusting a focus for the measurement region in which the contrast and brightness have been adjusted.
A method for image adjustment performed by a computer system controlling a charged particle beam device includes: by the computer system, specifying a measurement region from a captured image of a sample; performing centering processing based on the specified measurement region; extracting the measurement region in a field of view that has undergone the centering processing or the image that has undergone the centering processing; adjusting a contrast and brightness for the extracted measurement region; and adjusting a focus for the measurement region in which the contrast and brightness have been adjusted.
Public/Granted literature
- US20210183611A1 Method for Image Adjustment and Charged Particle Beam System Public/Granted day:2021-06-17
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