Invention Grant
- Patent Title: Processing oven
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Application No.: US17463012Application Date: 2021-08-31
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Publication No.: US11296049B1Publication Date: 2022-04-05
- Inventor: Christopher Lane , Eli Vronsky , Taylor Nguyen , Ronald R Stevens , Gabriel Ormonde , Jed Hsu
- Applicant: Yield Engineering Systems, Inc.
- Applicant Address: US CA Fremont
- Assignee: Yield Engineering Systems, Inc.
- Current Assignee: Yield Engineering Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Main IPC: H01L23/00
- IPC: H01L23/00 ; B23K1/008 ; B23K37/04 ; B23K101/40

Abstract:
A solder reflow oven includes a processing chamber that defines an enclosure. The enclosure includes a spindle configured to support a substrate and rotate the substrate about a central axis of the processing chamber. The spindle is also configured to move vertically along the central axis and position the substrate at different locations within the enclosure. The oven further includes a chemical delivery tube configured to direct a chemical vapor into the enclosure, a lamp assembly configured to heat a top surface of the substrate, and a lift assembly configured to move the spindle along the central axis.
Information query
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