Invention Grant
- Patent Title: III-V transistors with resistive gate contacts
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Application No.: US16645119Application Date: 2017-12-29
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Publication No.: US11302808B2Publication Date: 2022-04-12
- Inventor: Marko Radosavljevic , Sansaptak Dasgupta , Han Wui Then
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2017/068996 WO 20171229
- International Announcement: WO2019/132985 WO 20190704
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L21/8252 ; H01L29/40 ; H01L29/417 ; H01L29/51 ; H01L29/66 ; H01L29/49

Abstract:
Embodiments herein describe techniques, systems, and method for a semiconductor device that may include an III-V transistor with a resistive gate contact. A semiconductor device may include a substrate, and a channel base including a layer of GaN above the substrate. A channel stack may be above the channel base, and may include a layer of GaN in the channel stack, and a polarization layer above the layer of GaN in the channel stack. A gate stack may be above the channel stack, where the gate stack may include a gate dielectric layer above the channel stack, and a resistive gate contact above the gate dielectric layer. The resistive gate contact may include silicon (Si) or germanium (Ge). Other embodiments may be described and/or claimed.
Public/Granted literature
- US20210167200A1 III-V TRANSISTORS WITH RESISTIVE GATE CONTACTS Public/Granted day:2021-06-03
Information query
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