Invention Grant
- Patent Title: Wavelength tunable optical filter, optical module, and electronic apparatus
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Application No.: US16117380Application Date: 2018-08-30
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Publication No.: US11307478B2Publication Date: 2022-04-19
- Inventor: Susumu Shinto , Akira Sano , Teruyuki Nishimura
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2017-166545 20170831
- Main IPC: G02F1/21
- IPC: G02F1/21 ; G01J3/26 ; G01J3/32 ; G01J3/50 ; G01J3/42 ; G02B26/00
Abstract:
An optical filter includes a substrate, a first reflective film provided on the substrate, a second reflective film disposed to face the first reflective film, and a supporting portion provided on the substrate and supporting the second reflective film. The first reflective film is protected with a first protective film so as not to be exposed and the second reflective film is protected with a second protective film so as not to be exposed.
Public/Granted literature
- US20190064628A1 WAVELENGTH TUNABLE OPTICAL FILTER, OPTICAL MODULE, AND ELECTRONIC APPARATUS Public/Granted day:2019-02-28
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