Invention Grant
- Patent Title: Silicon germanium FinFET with low gate induced drain leakage current
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Application No.: US17134731Application Date: 2020-12-28
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Publication No.: US11316015B2Publication Date: 2022-04-26
- Inventor: Shogo Mochizuki , Kangguo Cheng , Choonghyun Lee , Juntao Li
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Samuel Waldbaum
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/161 ; H01L21/308 ; H01L29/78 ; H01L29/66 ; H01L29/51 ; H01L21/28 ; H01L29/08 ; H01L29/10 ; H01L21/768 ; H01L21/3065 ; H01L29/49

Abstract:
A method for forming the semiconductor device that includes forming an etch mask covering a drain side of the gate structure and the silicon containing fin structure; etching a source side of the silicon containing fin structure adjacent to the channel region; and forming a germanium containing semiconductor material on an etched sidewall of the silicon containing fin structure adjacent to the channel region. Germanium from the germanium containing semiconductor material is diffused into the channel region to provide a graded silicon germanium region in the channel region having germanium present at a highest concentration in the channel region at the source end of the channel region and a germanium deficient concentration at the drain end of the channel region.
Public/Granted literature
- US20210118998A1 SILICON GERMANIUM FINFET WITH LOW GATE INDUCED DRAIN LEAKAGE CURRENT Public/Granted day:2021-04-22
Information query
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