Invention Grant
- Patent Title: Film forming method
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Application No.: US16906432Application Date: 2020-06-19
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Publication No.: US11318495B2Publication Date: 2022-05-03
- Inventor: Masataka Hasegawa , Hayato Kanazawa
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JPJP2017-246151 20171222
- Main IPC: B05D1/02
- IPC: B05D1/02 ; B05D3/12 ; G02F1/13 ; B05D3/06 ; C23C24/04

Abstract:
An object of the present invention is to provide a film forming method capable of forming a film by an aerosol deposition with high accuracy patterning. The object of the present invention is achieved by aerosolizing a raw material liquid including a film forming material; supplying the aerosol to a base material; and forming a film of the film forming material on the base material, in which the base material has, on a film forming surface, a liquid-repellent region which has liquid repellency to the raw material liquid and a lyophilic region which has lyophilicity to the raw material liquid, and in a case where a width of the liquid-repellent region is L and a diameter of the aerosol is D, “D>L” is satisfied.
Public/Granted literature
- US20200316643A1 FILM FORMING METHOD Public/Granted day:2020-10-08
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