Invention Grant
- Patent Title: Thin-film deposition methods with thermal management of evaporation sources
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Application No.: US16572947Application Date: 2019-09-17
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Publication No.: US11326249B2Publication Date: 2022-05-10
- Inventor: Markus Eberhard Beck , Ulrich Alexander Bonne
- Applicant: First Solar, Inc.
- Applicant Address: US AZ Tempe
- Assignee: First Solar, Inc.
- Current Assignee: First Solar, Inc.
- Current Assignee Address: US AZ Tempe
- Agency: MacMillan, Sobanski & Todd, LLC
- Main IPC: C23C14/24
- IPC: C23C14/24
Abstract:
In various embodiments, evaporation sources for deposition processes have disposed therearound an insulation material configurable to fit snugly around the source body of the evaporation source and to be at least partially distanced away from the source body to expedite heat transfer therefrom.
Public/Granted literature
- US20200165717A1 THIN-FILM DEPOSITION METHODS WITH THERMAL MANAGEMENT OF EVAPORATION SOURCES Public/Granted day:2020-05-28
Information query
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