公开(公告)号：US20220259718A1

公开(公告)日：2022-08-18

申请号：US17738050

申请日：2022-05-06

Applicant: First Solar, Inc.

Inventor： Markus Eberhard Beck ,  Ulrich Alexander Bonne

IPC: C23C14/24

Abstract: An evaporation system comprises an evaporation chamber having an interior enclosed by one or more chamber walls; an evaporation source comprising (i) a source body for containing a feedstock material, and (ii) an evaporation port fluidly coupling the source body with an interior of the evaporation chamber; an insulation material; and a computer-based controller for configuring the insulation material in (i) a first configuration in which the insulation material is disposed snugly around the source body and (ii) a second configuration in which at least a portion of the insulation material is spaced away from the source body and at least a second portion of the insulation material is disposed snugly around the source body; wherein the insulation material does not cover an opening of the evaporation port in the first configuration and the second configuration.

公开(公告)号：US20210198783A1

公开(公告)日：2021-07-01

申请号：US17182473

申请日：2021-02-23

Applicant: First Solar, Inc.

Inventor： Markus Eberhard Beck ,  Ulrich Alexander Bonne ,  Robert G. Wendt

IPC: C23C14/26 ,  C23C14/24 ,  C23C14/54 ,  F28D15/00 ,  H01L31/046 ,  C23C16/448 ,  F25B39/00 ,  H01L31/032 ,  H01L31/18 ,  H01L51/00 ,  H01L51/56 ,  C23C16/02 ,  C23C16/28 ,  C23C16/52 ,  F25D17/02

Abstract: In various embodiments, evaporation sources for deposition systems are heated and/or cooled via a fluid-based thermal management system.

公开(公告)号：US11866817B2

公开(公告)日：2024-01-09

申请号：US17738050

申请日：2022-05-06

Applicant: First Solar, Inc.

Inventor： Markus Eberhard Beck ,  Ulrich Alexander Bonne

IPC: C23C14/24

CPC classification number: C23C14/243

Abstract: An evaporation system comprises an evaporation chamber having an interior enclosed by one or more chamber walls; an evaporation source comprising (i) a source body for containing a feedstock material, and (ii) an evaporation port fluidly coupling the source body with an interior of the evaporation chamber; an insulation material; and a computer-based controller for configuring the insulation material in (i) a first configuration in which the insulation material is disposed snugly around the source body and (ii) a second configuration in which at least a portion of the insulation material is spaced away from the source body and at least a second portion of the insulation material is disposed snugly around the source body; wherein the insulation material does not cover an opening of the evaporation port in the first configuration and the second configuration.

公开(公告)号：US11326249B2

公开(公告)日：2022-05-10

申请号：US16572947

申请日：2019-09-17

Applicant: First Solar, Inc.

Inventor： Markus Eberhard Beck ,  Ulrich Alexander Bonne

IPC: C23C14/24

Abstract: In various embodiments, evaporation sources for deposition processes have disposed therearound an insulation material configurable to fit snugly around the source body of the evaporation source and to be at least partially distanced away from the source body to expedite heat transfer therefrom.

公开(公告)号：US10727362B2

公开(公告)日：2020-07-28

申请号：US16265419

申请日：2019-02-01

Applicant: First Solar, Inc.

Inventor： Markus Eberhard Beck

IPC: H01L31/048 ,  H01L31/02 ,  H01G9/20 ,  H01L31/18 ,  H01L31/0445 ,  H01L31/028 ,  H01L31/0296 ,  H01L31/0304 ,  H01L31/032 ,  H01L31/068 ,  H01L31/075 ,  H01L51/44

Abstract: In various embodiments, photovoltaic modules are hermetically sealed by providing a first glass sheet, a photovoltaic device disposed on the first glass sheet, and a second glass sheet, a gap being defined between the first and second glass sheets, disposing a glass powder within the gap, and heating the powder to seal the glass sheets.