Invention Grant
- Patent Title: Methods for aligning a particle beam and performing a non-contact electrical measurement on a cell using a registration cell
-
Application No.: US17061401Application Date: 2020-10-01
-
Publication No.: US11328899B2Publication Date: 2022-05-10
- Inventor: Indranil De , Jeremy Cheng , Thomas Sokollik , Yoram Schwarz , Stephen Lam , Xumin Shen
- Applicant: PDF SOLUTIONS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: PDF SOLUTIONS, INC.
- Current Assignee: PDF SOLUTIONS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Resonance IP Law, PC
- Main IPC: H01J37/30
- IPC: H01J37/30 ; H01J37/317 ; G01R31/306 ; G01R31/265
Abstract:
Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.
Public/Granted literature
Information query
