公开(公告)号：US11605526B2

公开(公告)日：2023-03-14

申请号：US17739063

申请日：2022-05-06

Applicant: PDF SOLUTIONS, INC.

Inventor： Indranil De ,  Jeremy Cheng ,  Thomas Sokollik ,  Yoram Schwarz ,  Stephen Lam ,  Xumin Shen

IPC: G01R31/265 ,  H01J37/317 ,  H01J37/30 ,  G01R31/306

Abstract: Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US12020897B2

公开(公告)日：2024-06-25

申请号：US18108583

申请日：2023-02-11

Applicant: PDF SOLUTIONS, INC.

Inventor： Indranil De ,  Jeremy Cheng ,  Thomas Sokollik ,  Yoram Schwarz ,  Stephen Lam ,  Xumin Shen

IPC: H01J37/30 ,  G01R31/265 ,  G01R31/306 ,  H01J37/317

CPC classification number: H01J37/3175 ,  G01R31/2653 ,  G01R31/306 ,  H01J37/3005 ,  H01J2237/31762

Abstract: Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.

公开(公告)号：US11328899B2

公开(公告)日：2022-05-10

申请号：US17061401

申请日：2020-10-01

Applicant: PDF SOLUTIONS, INC.

Inventor： Indranil De ,  Jeremy Cheng ,  Thomas Sokollik ,  Yoram Schwarz ,  Stephen Lam ,  Xumin Shen

IPC: H01J37/30 ,  H01J37/317 ,  G01R31/306 ,  G01R31/265

Abstract: Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.