Invention Grant
- Patent Title: Two-stage ion source comprising closed and open ion volumes
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Application No.: US17053557Application Date: 2019-05-08
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Publication No.: US11328919B2Publication Date: 2022-05-10
- Inventor: Viatcheslav Artaev , Georgy Y. Tikhonov
- Applicant: LECO Corporation
- Applicant Address: US MI St. Joseph
- Assignee: LECO Corporation
- Current Assignee: LECO Corporation
- Current Assignee Address: US MI St. Joseph
- Agency: Honigman LLP
- International Application: PCT/US2019/031298 WO 20190508
- International Announcement: WO2019/217541 WO 20191114
- Main IPC: H01J49/00
- IPC: H01J49/00 ; H01J49/10 ; G01N30/72
Abstract:
An ion source includes a base, a first chamber, a second chamber and an extractor. The first chamber is disposed downstream of the base and defines a first internal volume having a first pressure. The second chamber is disposed downstream of the first chamber and defines a second internal volume having a second pressure. The second pressure is less than the first pressure. The repeller electrode is disposed within the first chamber. The extractor is disposed downstream of the second chamber.
Public/Granted literature
- US20210233760A1 Two-Stage Ion Source Comprising Closed and Open Ion Volumes Public/Granted day:2021-07-29
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