Invention Grant
- Patent Title: Resistive random access memory and manufacturing method thereof
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Application No.: US16839270Application Date: 2020-04-03
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Publication No.: US11329222B2Publication Date: 2022-05-10
- Inventor: Po-Yen Hsu , Bo-Lun Wu , Ting-Ying Shen
- Applicant: Winbond Electronics Corp.
- Applicant Address: TW Taichung
- Assignee: Winbond Electronics Corp.
- Current Assignee: Winbond Electronics Corp.
- Current Assignee Address: TW Taichung
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW108111859 20190403
- Main IPC: H01L45/00
- IPC: H01L45/00 ; G11C13/00 ; H01L27/24

Abstract:
A resistive random access memory (RRAM) and its manufacturing method are provided. The RRAM includes a substrate having an array region and a peripheral region. A plurality of memory cells and a gap-filling dielectric layer overlying the memory cells are located on the substrate and in the array region. A buffer layer only in the array region covers the gap-filling dielectric layer, and its material layer is different from that of the gap-filling dielectric layer. A first low-k dielectric layer is only located in the peripheral region, and its material is different from that of the buffer layer. A dielectric constant of the first low-k dielectric layer is less than 3. A top surface of the first low-k dielectric layer is coplanar with that of the buffer layer. A first conductive plug passes through the buffer layer and the gap-filling dielectric layer and contacts one of the memory cells.
Public/Granted literature
- US20200321521A1 RESISTIVE RANDOM ACCESS MEMORY AND MANUFACTURING METHOD THEREOF Public/Granted day:2020-10-08
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