Invention Grant
- Patent Title: Plasma polymerization coating with uniformity control
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Application No.: US16427199Application Date: 2019-05-30
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Publication No.: US11332829B2Publication Date: 2022-05-17
- Inventor: Jian Zong
- Applicant: Jiangsu Favored Nanotechnology Co., Ltd.
- Applicant Address: CN Wuxi
- Assignee: Jiangsu Favored Nanotechnology Co., Ltd.
- Current Assignee: Jiangsu Favored Nanotechnology Co., Ltd.
- Current Assignee Address: CN Wuxi
- Agency: Perkins Coie LLP
- Priority: CN201611077033.1 20161130
- Main IPC: C23C16/50
- IPC: C23C16/50 ; H01J37/32 ; C23C16/458 ; B05D1/00 ; C23C16/44 ; C23C16/455

Abstract:
Introduced here is a plasma polymerization apparatus and process. Example embodiments include a vacuum chamber in a substantially symmetrical shape relative to a central axis. A primary rotation shaft may be operable to rotate about the central axis of the vacuum chamber and a secondary rotation shaft may be operable to rotate about a secondary axis distal to the central axis. The primary and secondary rotation shafts may be mechanically connected, and one or more devices may be secured on a platform that rotates along both shafts. Additionally, reactive species discharge mechanisms positioned around a perimeter of the vacuum chamber may be configured to disperse reactive species into the vacuum chamber. The reactive species may form a uniform polymeric multi-layer coating on the surface of the one or more devices.
Public/Granted literature
- US20190276933A1 PLASMA POLYMERIZATION COATING WITH UNIFORMITY CONTROL Public/Granted day:2019-09-12
Information query
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