Invention Grant
- Patent Title: Plasma processing method and plasma processing apparatus
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Application No.: US16979655Application Date: 2019-06-10
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Publication No.: US11337297B2Publication Date: 2022-05-17
- Inventor: Takashi Dokan , Shinji Kubota , Chishio Koshimizu
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Xsensus LLP
- Priority: JPJP2018-119087 20180622
- International Application: PCT/JP2019/022952 WO 20190610
- International Announcement: WO2019/244697 WO 20191226
- Main IPC: H05H1/46
- IPC: H05H1/46 ; H01J37/32 ; H01L21/3065 ; H01L21/311

Abstract:
A plasma processing method includes performing a first plasma processing in a processing chamber in a first period, and performing a second plasma processing in the processing chamber during a second period continuously after the first period. In the first period and the second period, a first radio-frequency power for bias is continuously supplied to a lower electrode. A second radio-frequency power for plasma generation may be supplied as a pulsed radio-frequency power in a first partial period in each cycle of the first radio-frequency power in the first period. The second radio-frequency power may be supplied as a pulsed radio-frequency power in a second partial period in each cycle of the first radio-frequency power in the second period.
Public/Granted literature
- US20210051792A1 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS Public/Granted day:2021-02-18
Information query
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