Invention Grant
- Patent Title: Laser chamber, method for manufacturing seal member, and method for manufacturing electronic device
-
Application No.: US17007623Application Date: 2020-08-31
-
Publication No.: US11349272B2Publication Date: 2022-05-31
- Inventor: Masaharu Miki
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/22
- IPC: H01S3/22 ; H01S3/03 ; H01S3/225 ; H01S3/034 ; H01S3/134
Abstract:
A laser chamber of an excimer laser apparatus includes a container including a first member and a second member and configured to accommodate a laser gas in the container and a seal member disposed between two seal surfaces facing each other, a seal surface of the first member and a seal surface of the second member. A laser-gas-side surface of the seal member is made of fluorine-based rubber, and an atmosphere-side surface of the seal member is formed of a film configured to suppress atmosphere transmission.
Information query
