Invention Grant
- Patent Title: Monolithic spectrometer
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Application No.: US16584433Application Date: 2019-09-26
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Publication No.: US11353363B2Publication Date: 2022-06-07
- Inventor: Dan Allen , Viresh Patel
- Applicant: Integrated Device Technology, Inc.
- Applicant Address: US CA San Jose
- Assignee: Integrated Device Technology, Inc.
- Current Assignee: Integrated Device Technology, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Haynes and Boone, LLP
- Main IPC: G01J3/02
- IPC: G01J3/02 ; G01J3/28 ; G01J3/51

Abstract:
In some embodiments, a spectrometer is presented. In accordance with some embodiments, the spectrometer includes an optical sensor array, the optical sensor array including a substrate and an array of pixels formed on the substrate; a spectral filter array formed over the pixels of the optical sensor array, the spectral filter array filtering incident light such that each pixel receives light of a spectral transmission profile associated with the pixel; a transparent spacer formed over the spectral filter array; and an opaque mask having input apertures allowing light through the transparent spacer and onto a portion of the spectral filter array. The spectrometer can be formed from the optical sensor array using a combination of photolithographic techniques and bonding of certain layers.
Public/Granted literature
- US20210096025A1 Monolithic Spectrometer Public/Granted day:2021-04-01
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