Invention Grant
- Patent Title: Multi-beam blanking device and multi-charged-particle-beam writing apparatus
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Application No.: US17169782Application Date: 2021-02-08
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Publication No.: US11355302B2Publication Date: 2022-06-07
- Inventor: Hiroshi Yamashita , Yoshikuni Goshima , Hirofumi Morita , Hiroshi Matsumoto
- Applicant: NuFlare Technology, Inc.
- Applicant Address: JP Yokohama
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Yokohama
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2020-047967 20200318
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/04 ; H01J37/147

Abstract:
In one embodiment, a multi-beam blanking device includes a semiconductor substrate, an insulating film that is disposed on the semiconductor substrate, an antistatic film that is disposed on the insulating film, a plurality of cells each of which is related to a through-hole that penetrate the semiconductor substrate and the insulating film and each of which includes a blanking electrode and a ground electrode that are disposed on the insulating film, and a ground wiring line that is disposed in the insulating film. The antistatic film and the ground wiring line are connected to each other at a joint that extends through the insulating film on the ground wiring line.
Public/Granted literature
- US20210296074A1 MULTI-BEAM BLANKING DEVICE AND MULTI-CHARGED-PARTICLE-BEAM WRITING APPARATUS Public/Granted day:2021-09-23
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