Invention Grant
- Patent Title: Low keV ion beam image restoration by machine learning for object localization
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Application No.: US16596538Application Date: 2019-10-08
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Publication No.: US11355305B2Publication Date: 2022-06-07
- Inventor: Remco Johannes Petrus Geurts , Pavel Potocek , Maurice Peemen , Ondrej Machek
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/22 ; G06N3/08 ; H01J37/26 ; H01J37/305

Abstract:
Methods and systems for creating TEM lamella using image restoration algorithms for low keV FIB images are disclosed. An example method includes irradiating a sample with an ion beam at low keV settings, generating a low keV ion beam image of the sample based on emissions resultant from irradiation by the ion beam, and then applying an image restoration model to the low keV ion beam image of the sample to generate a restored image. The sample is then localized within the restored image, and a low keV milling of the sample is performed with the ion beam based on the localized sample within the restored image.
Public/Granted literature
- US20210104375A1 LOW KEV ION BEAM IMAGE RESTORATION BY MACHINE LEARNING FOR OBJECT LOCALIZATION Public/Granted day:2021-04-08
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