Invention Grant
- Patent Title: Method and apparatus for determining a wavefront of a massive particle beam
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Application No.: US16832471Application Date: 2020-03-27
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Publication No.: US11355311B2Publication Date: 2022-06-07
- Inventor: Joachim Welte , Markus Bauer
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102019204575.8 20190401
- Main IPC: H01J37/28
- IPC: H01J37/28

Abstract:
The present application relates to a method and an apparatus for determining a wavefront of a massive particle beam, including the steps of: (a) recording two or more images of a reference structure using the massive particle beam under different recording conditions; (b) generating point spread functions for the two or more recorded images with a modified reference image of the reference structure; and (c) performing a phase reconstruction of the massive particle beam on the basis of the generated point spread functions and the different recording conditions, for the purposes of determining the wavefront.
Public/Granted literature
- US20200312613A1 METHOD AND APPARATUS FOR DETERMINING A WAVEFRONT OF A MASSIVE PARTICLE BEAM Public/Granted day:2020-10-01
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