Invention Grant
- Patent Title: Robot for simultaneous substrate transfer
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Application No.: US16922536Application Date: 2020-07-07
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Publication No.: US11355367B2Publication Date: 2022-06-07
- Inventor: Jason M. Schaller , Charles T. Carlson , Luke Bonecutter , David Blahnik , Karuppasamy Muthukamatchi , Jeff Hudgens , Benjamin Riordon
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B65G47/90 ; H01L21/687 ; H01L21/68

Abstract:
Exemplary substrate processing systems may include a transfer region housing defining a transfer region, and including substrate supports and a transfer apparatus. The transfer apparatus may include a central hub having a housing, and including a first shaft and a second shaft. The housing may be coupled with the second shaft, and may define an internal housing volume. The transfer apparatus may include a plurality of arms equal to a number of substrate supports of the plurality of substrate supports. Each arm of the plurality of arms may be coupled about an exterior of the housing. The transfer apparatus may include a plurality of arm hubs disposed within the internal housing volume. Each arm hub of the plurality of arm hubs may be coupled with an arm of the plurality of arms through the housing. The arm hubs may be coupled with the first shaft of the central hub.
Public/Granted literature
- US20210013068A1 ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER Public/Granted day:2021-01-14
Information query
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