Invention Grant
- Patent Title: Susceptor having CF coating
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Application No.: US17126275Application Date: 2020-12-18
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Publication No.: US11359302B2Publication Date: 2022-06-14
- Inventor: Ippei Yanagisawa
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Studebaker & Brackett PC
- Main IPC: C25D11/24
- IPC: C25D11/24 ; C25D11/16 ; H05B6/10 ; C25D17/16 ; C25D21/12
Abstract:
Examples of a susceptor for supporting a substrate includes a base metal formed of aluminum or a material containing aluminum, an anodized layer covering a surface of the base metal and having cracks therein, and a CF coating of polymer provided in the cracks such that the exposure of the base metal is avoided.
Public/Granted literature
- US20210108328A1 SUSCEPTOR HAVING CF COATING Public/Granted day:2021-04-15
Information query
