Invention Grant
- Patent Title: Charged particle beam device
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Application No.: US17257408Application Date: 2018-07-25
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Publication No.: US11367588B2Publication Date: 2022-06-21
- Inventor: Ryo Komatsuzaki , Atsushi Sawada
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Tech Corporation
- Current Assignee: Hitachi High-Tech Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- International Application: PCT/JP2018/027859 WO 20180725
- International Announcement: WO2020/021649 WO 20200130
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/28
Abstract:
An object of the present invention is to provide a charged particle beam device capable of easily and quickly calling a function required by a user on a GUI. A charged particle beam device according to the invention presents an operation component that is recommended to be provided on a component set according to an operation history of the charged particle beam device (see FIG. 5).
Public/Granted literature
- US20210272769A1 Charged Particle Beam Device Public/Granted day:2021-09-02
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