Invention Grant
- Patent Title: Method for producing a nanofilm, sensor arrangement comprising a nanofilm, and nanosieve comprising a nanofilm
-
Application No.: US16433289Application Date: 2019-06-06
-
Publication No.: US11378536B2Publication Date: 2022-07-05
- Inventor: Derek Debie , Alexander Zoepfl
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: DE102018209083.1 20180607
- Main IPC: G01N27/12
- IPC: G01N27/12 ; G01N27/22 ; B05D7/22 ; B05D3/12 ; B82Y40/00

Abstract:
A method for producing a nanofilm includes providing a microsieve having a first and a second opposite surface region, wherein micropores are formed between the first and second surface regions; applying a nanomaterial suspension on the first surface region of the microsieve, wherein the nanomaterial suspension comprises nanomaterial particles; and creating a pressure difference at a plurality of the micropores between the first and second surface region of the microsieve in order to move the nanomaterial suspension into the micropores and/or through the micropores, such that the nanomaterial particles adhere to the first surface region and to the wall regions of the micropores and form the nanofilm.
Information query