Invention Grant
- Patent Title: Depth reconstruction for 3D images of samples in a charged particle system
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Application No.: US17039513Application Date: 2020-09-30
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Publication No.: US11380529B2Publication Date: 2022-07-05
- Inventor: Pavel Potocek , Milo{hacek over (s)} Hovorka , Maurice Peemen , Luká{hacek over (s)} Hübner
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/28

Abstract:
Methods and systems for generating high resolution reconstructions of 3D samples imaged using slice and view processes where the electron interaction depth of the imaging beam is greater than slice thicknesses. Data obtained via such slice and view processes is enhanced with a depth blur reducing algorithm, that is configured to reduce depth blur caused by portions of the first data and second data that are resultant from electron interactions outside the first layer and second layer, respectively, to create enhanced first data and second enhanced data. A high-resolution 3D reconstruction of the sample is then generated using the enhanced first data and the enhanced second data. In some embodiments, the depth blur reducing algorithm may be selected from a set of such algorithms that have been individually configured for certain microscope conditions, sample conditions, or a combination thereof.
Public/Granted literature
- US20220102121A1 DEPTH RECONSTRUCTION FOR 3D IMAGES OF SAMPLES IN A CHARGED PARTICLE SYSTEM Public/Granted day:2022-03-31
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