Invention Grant
- Patent Title: Phase change memory cell with second conductive layer
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Application No.: US16515094Application Date: 2019-07-18
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Publication No.: US11380842B2Publication Date: 2022-07-05
- Inventor: Juntao Li , Kangguo Cheng , Ruilong Xie , Junli Wang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agent Anthony M. Pallone
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A method may include forming a via opening in a dielectric layer, depositing a first conductive layer along a bottom and a sidewall of the via opening, depositing a second conductive layer on top of the first conductive layer. The method may further include recessing the first conductive layer to form a trench and exposing a sidewall of the second conductive layer, depositing a non-conductive material in the trench, and depositing a phase change material layer on top of the dielectric layer. The top surface of the second conductive layer may be in direct contact with a bottom surface of the phase change material layer.
Public/Granted literature
- US20210020833A1 PHASE CHANGE MEMORY CELL WITH SECOND CONDUCTIVE LAYER Public/Granted day:2021-01-21
Information query
IPC分类: