Invention Grant
- Patent Title: Laterally actuated amplified capacitive vapor sensor
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Application No.: US16338652Application Date: 2017-10-30
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Publication No.: US11408846B2Publication Date: 2022-08-09
- Inventor: Carlos H. Mastrangelo , Hanseup Kim , Rugved Likhite
- Applicant: UNIVERSITY OF UTAH RESEARCH FOUNDATION
- Applicant Address: US UT Salt Lake City
- Assignee: UNIVERSITY OF UTAH RESEARCH FOUNDATION
- Current Assignee: UNIVERSITY OF UTAH RESEARCH FOUNDATION
- Current Assignee Address: US UT Salt Lake City
- Agency: Michael Best & Friedrich LLP
- International Application: PCT/US2017/059088 WO 20171030
- International Announcement: WO2018/081735 WO 20180503
- Main IPC: G01N27/22
- IPC: G01N27/22 ; H01G5/16 ; H01G5/011 ; H01G5/18

Abstract:
A capacitive vapor sensor, sensor system, and method for determining a vapor concentration is provided. The capacitive sensor includes a first electrode and a second electrode. The first and second electrodes are configured to provide a bias voltage. The sensor further includes a cantilevered sensor electrode interdigitated between the first and second electrodes and having an adsorptive polymer attached to a surface of the cantilevered sensor electrode. The adsorptive polymer is configured to expand in response to adsorbing a vapor and cause a deflection of the cantilevered sensor electrode, the deflection causing a change in a differential capacitance of the first and second electrodes. A sensor indicates current at the cantilevered sensor electrode, and an electronic processor determines the change in the differential capacitance to determine a characteristic or concentration of the vapor.
Public/Granted literature
- US20190227019A1 LATERALLY ACTUATED AMPLIFIED CAPACITIVE VAPOR SENSOR Public/Granted day:2019-07-25
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