Invention Grant
- Patent Title: Pumping liner for improved flow uniformity
-
Application No.: US16886088Application Date: 2020-05-28
-
Publication No.: US11415147B2Publication Date: 2022-08-16
- Inventor: Muhannad Mustafa , Muhammad M. Rasheed , Mario D. Sanchez
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: C23C16/40
- IPC: C23C16/40 ; F04D29/42 ; F04D29/62 ; C23C16/44

Abstract:
Pumping liners for process chambers including a first ring-shaped body and a second ring-shaped body are described. The first ring-shaped body has a first plurality of openings and the second ring-shaped body has a second plurality of openings. The first ring-shaped body and the second ring-shaped body are rotatable relative to each other around a central axis to at least partially overlap the first plurality of openings and the second plurality of openings to change the area of conductance through the openings. Methods of removing gases from a processing chamber are also described.
Public/Granted literature
- US20200378402A1 PUMPING LINER FOR IMPROVED FLOW UNIFORMITY Public/Granted day:2020-12-03
Information query
IPC分类: