Invention Grant
- Patent Title: Inorganic piezoelectric materials formed on fibers and applications thereof
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Application No.: US16072165Application Date: 2016-04-01
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Publication No.: US11421376B2Publication Date: 2022-08-23
- Inventor: Shawna M. Liff , Feras Eid , Aleksandar Aleksov , Sasha N. Oster , Baris Bicen , Thomas L. Sounart , Valluri R. Rao , Johanna M. Swan
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2016/025655 WO 20160401
- International Announcement: WO2017/171856 WO 20171005
- Main IPC: H01L41/047
- IPC: H01L41/047 ; D06M10/06 ; D06M11/46 ; D06M11/47 ; H01L41/316 ; D06M17/00 ; H01L41/087 ; D06M11/83 ; H01L41/187 ; H01L41/29 ; D01F11/00

Abstract:
Embodiments of the invention include an active fiber with a piezoelectric layer that has a crystallization temperature that is greater than a melt or draw temperature of the fiber and methods of forming such active fibers. According to an embodiment, a first electrode is formed over an outer surface of a fiber. Embodiments may then include depositing a first amorphous piezoelectric layer over the first electrode. Thereafter, the first amorphous piezoelectric layer may be crystallized with a pulsed laser annealing process to form a first crystallized piezoelectric layer. In an embodiment, the pulsed laser annealing process may include exposing the first amorphous piezoelectric layer to radiation from an excimer laser with an energy density between approximately 10 and 100 mJ/cm2 and pulse width between approximately 10 and 50 nanoseconds. Embodiments may also include forming a second electrode over an outer surface of the crystallized piezoelectric layer.
Public/Granted literature
- US20190032272A1 INORGANIC PIEZOELECTRIC MATERIALS FORMED ON FIBERS & APPLICATIONS THEREOF Public/Granted day:2019-01-31
Information query
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