Invention Grant
- Patent Title: Illumination apertures for extended sample lifetimes in helical tomography
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Application No.: US17137130Application Date: 2020-12-29
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Publication No.: US11430633B2Publication Date: 2022-08-30
- Inventor: Ondrej L. Shanel , Trond Karsten Varslot , Martin Schneider , Maarten Kuijper , Ondrej R. Baco , Václav Batelka
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Klarquist Sparkman, LLP
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/09 ; H01J37/20

Abstract:
Apertures having references edges are situated to define a sample irradiation zone and a shielded zone. The sample irradiation zone includes a portion proximate the shielded zone that is conjugate to a detector. A sample is scanned into the sample irradiation zone from the shielded zone so that the sample can remain unexposed until situated properly with respect to the detector for imaging. Irradiation exposure of the sample is reduced, permitting superior imaging.
Public/Granted literature
- US20220208511A1 ILLUMINATION APERTURES FOR EXTENDED SAMPLE LIFETIMES IN HELICAL TOMOGRAPHY Public/Granted day:2022-06-30
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