Invention Grant
- Patent Title: Methods of modelling systems or performing predictive maintenance of systems, such as lithographic systems and associated lithographic systems
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Application No.: US16492670Application Date: 2018-02-15
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Publication No.: US11461675B2Publication Date: 2022-10-04
- Inventor: David Evert Song Kook Sigtermans , Marcel Richard André Brunt , Nicolaas Hendrik Frank Ploos Van Amstel , Errol Arthur Zalmijn , Stefan Lucian Voinea , Gerardus Albertus Wilhelmus Sigbertus Preusting
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP17162628 20170323
- International Application: PCT/EP2018/053781 WO 20180215
- International Announcement: WO2018/171982 WO 20180927
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G06N5/04 ; G06N20/00 ; G06Q30/02 ; G06F17/18

Abstract:
A method for determining a causal relationship between events in a plurality of parameter time series, the method including: identifying a first event associated with a parameter excursion event; identifying a second event associated with a failure event, wherein there are a plurality of events including the first events and second events; determining values of transfer entropy for pairs of the events to establish a causal relationship for each of the pairs of events; using the determined values of transfer entropy and identified causal relationships to determine a process network, wherein each of the events is a node in the process network, the edges between nodes being dependent upon the values of transfer entropy; identifying a directed cycle within the plurality of events and the causal relationships; classifying a directed cycle; and classifying one or more events having a causal relation to the classified directed cycle.
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