Invention Grant
- Patent Title: Array antenna and plasma processing apparatus
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Application No.: US17144647Application Date: 2021-01-08
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Publication No.: US11476088B2Publication Date: 2022-10-18
- Inventor: Eiki Kamata , Taro Ikeda , Mikio Sato , Nobuhiko Yamamoto
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JPJP2020-004973 20200116
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46 ; H01Q1/52

Abstract:
An array antenna radiates an electromagnetic wave into a chamber of a plasma processing apparatus. The array antenna includes antennas and coupling prevention elements arranged at intervals between the antennas. Each of the coupling prevention elements includes a first member connected to a ceiling wall which is a ground surface in the chamber and a second member connected to a tip end of the first member or a vicinity of the tip end of the first member.
Public/Granted literature
- US20210225612A1 ARRAY ANTENNA AND PLASMA PROCESSING APPARATUS Public/Granted day:2021-07-22
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