Invention Grant
- Patent Title: Semiconductor device and method of forming the same
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Application No.: US17165949Application Date: 2021-02-03
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Publication No.: US11476305B2Publication Date: 2022-10-18
- Inventor: Yung-Han Chiu , Shu-Ming Li , Po-Yen Hsu
- Applicant: Winbond Electronics Corp.
- Applicant Address: TW Taichung
- Assignee: Winbond Electronics Corp.
- Current Assignee: Winbond Electronics Corp.
- Current Assignee Address: TW Taichung
- Agency: JCIPRNET
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
A semiconductor device and method of forming the same are provided. The semiconductor device includes a first conductive line over a substrate and a memory structure over the first conductive line. The memory structure is electrically coupled to the first conductive line through a conductive via. A spacer layer is laterally aside the memory structure and covers sidewalls of the memory structure. A first dielectric layer is on the spacer layer and laterally aside the memory structure. A second dielectric layer is on the memory structure, the spacer layer and the first dielectric layer. A second conductive line penetrates through the second dielectric layer, the first dielectric layer and the spacer layer to electrically couple to the memory structure. The second conductive line includes a body part at least partially embedded in the second dielectric layer and an extension part underlying the body part and laterally protruding from a sidewall of the body part. The extension part is electrically connected to an upper electrode of the memory structure and surrounded by the spacer layer.
Public/Granted literature
- US20220246680A1 SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME Public/Granted day:2022-08-04
Information query
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