Invention Grant
- Patent Title: Ferroelectric-based field-effect transistor with threshold voltage switching for enhanced on-state and off-state performance
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Application No.: US16907445Application Date: 2020-06-22
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Publication No.: US11476345B2Publication Date: 2022-10-18
- Inventor: Han Wui Then , Sansaptak Dasgupta , Marko Radosavljevic
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/20 ; H01L29/778 ; H01L49/02 ; H01L29/78 ; H01L29/66 ; H01L29/08 ; H01L29/423

Abstract:
Techniques are disclosed herein for ferroelectric-based field-effect transistors (FETs) with threshold voltage (VT) switching for enhanced RF switch transistor on-state and off-state performance. Employing a ferroelectric gate dielectric layer that can switch between two ferroelectric states enables a higher VT during the transistor off-state (VT,hi) and a lower VT during the transistor on-state (VT,lo). Accordingly, the transistor on-state resistance (Ron) can be maintained low due to the available relatively high gate overdrive (Vg,on−VT,lo) while still handling a relatively high maximum RF power in the transistor off-state due to the high VT,hi −Vg,off value. Thus, the Ron of an RF switch transistor can be improved without sacrificing maximum RF power, and/or vice versa, the maximum RF power can be improved without sacrificing the Ron. A ferroelectric layer (e.g., including HfxZryO) can be formed between a transistor gate dielectric layer and gate electrode to achieve such benefits.
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