Invention Grant
- Patent Title: MEMS microphone assembly and method for fabricating a MEMS microphone assembly
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Application No.: US17279749Application Date: 2019-09-17
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Publication No.: US11477581B2Publication Date: 2022-10-18
- Inventor: Goran Stojanovic , Colin Steele , Simon Mueller , Thomas Froehlich , Erik Jan Lous , Anderson Pires Singulani
- Applicant: ams AG
- Applicant Address: AT Premstätten
- Assignee: ams AG
- Current Assignee: ams AG
- Current Assignee Address: AT Premstätten
- Agency: MH2 Technology Law Group LLP
- Priority: EP18196920 20180926
- International Application: PCT/EP2019/074844 WO 20190917
- International Announcement: WO2020/064428 WO 20200402
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R19/00 ; H04R31/00

Abstract:
A micro-electro-mechanical system, MEMS, microphone assembly comprises an enclosure defining a first cavity, and a MEMS microphone arranged inside the first cavity. The microphone comprises a first die with bonding structures and a MEMS diaphragm, and a second die having an application specific integrated circuit, ASIC. The second die is bonded to the bonding structures such that a gap is formed between a first side of the diaphragm and the second die, with the gap defining a second cavity. The first side of the diaphragm is interfacing with the second cavity and a second side of the diaphragm is interfacing with the environment via an acoustic inlet port of the enclosure. The bonding structures are arranged such that pressure ventilation openings are formed that connect the first cavity and the second cavity.
Public/Granted literature
- US20220038825A1 MEMS microphone assembly and method for fabricating a MEMS microphone assembly Public/Granted day:2022-02-03
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