- Patent Title: Thermal repeatability and in-situ showerhead temperature monitoring
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Application No.: US16834814Application Date: 2020-03-30
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Publication No.: US11508558B2Publication Date: 2022-11-22
- Inventor: Timothy Joseph Franklin , Steven E. Babayan , Philip Allan Kraus
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; B05B1/00 ; B05B1/18 ; B05B12/10 ; H01L21/67
Abstract:
Embodiments described herein generally related to a substrate processing apparatus, and more specifically to an improved showerhead assembly for a substrate processing apparatus. The showerhead assembly includes a chill plate, a gas plate, and a gas distribution plate having a top surface and a bottom surface. A plurality of protruded features contacts the top surface of the gas distribution plate. A fastener and an energy storage structure is provided on the protruded features. The energy storage structure is compressed by the fastener and axially loads at least one of the protruded features to compress the chill plate, the gas plate and the gas distribution plate.
Public/Granted literature
- US20200227242A1 THERMAL REPEATABILITY AND IN-SITU SHOWERHEAD TEMPERATURE MONITORING Public/Granted day:2020-07-16
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