Invention Grant
- Patent Title: Light detector
-
Application No.: US16636539Application Date: 2018-07-24
-
Publication No.: US11519785B2Publication Date: 2022-12-06
- Inventor: Masahiro Yamazaki , Katsumi Shibayama , Ryusuke Kitaura , Ryosuke Koike , Go Tanaka
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JPJP2017-155977 20170810
- International Application: PCT/JP2018/027734 WO 20180724
- International Announcement: WO2019/031234 WO 20190214
- Main IPC: G01J5/20
- IPC: G01J5/20 ; G01J1/02 ; G01J5/02 ; G01J5/04 ; H01L27/144 ; H01L31/0232 ; H01L31/0248 ; H01L31/09

Abstract:
A light detector includes a substrate, a membrane disposed on a surface of the substrate, a first and a second electrode post supporting the membrane. The first electrode post includes a first main body portion having a tubular shape spreading from a first electrode pad toward a side opposite to the substrate, and a first flange portion provided in an end portion at the side opposite to the substrate in the first main body portion. The first flange portion is provided with a first sloped surface inclined so as to approach the substrate as it goes away from the first main body portion. A first wiring layer reaches an inner surface of the first main body portion through the first sloped surface. The second electrode post and the second wiring layer are formed similarly to the first electrode post and the first wiring layer.
Public/Granted literature
- US20200249094A1 LIGHT DETECTOR Public/Granted day:2020-08-06
Information query