Invention Grant
- Patent Title: Gas injector with baffle
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Application No.: US17365791Application Date: 2021-07-01
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Publication No.: US11529592B2Publication Date: 2022-12-20
- Inventor: Vishwas Kumar Pandey , Lara Hawrylchak , Eric Kihara Shono , Kartik Shah , Christopher S. Olsen , Sairaju Tallavarjula , Kailash Pradhan , Rene George , Johanes F. Swenberg , Stephen Moffatt
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Priority: IN201741035705 20171009
- Main IPC: C23C16/455
- IPC: C23C16/455 ; B01F23/10 ; B01J8/22 ; H01L21/67 ; B01J4/00

Abstract:
Gas injectors for providing uniform flow of fluid are provided herein. The gas injector includes a plenum body. The plenum body includes a recess, a protrusion adjacent to the recess and extending laterally away from the plenum body, and a plurality of nozzles extending laterally from an exterior surface of the plenum body. The plenum body has a plurality of holes in an exterior wall of the plenum body. Each nozzle is in fluid communication with an interior volume of the plenum body. By directing the flow of fluid, the gas injector provides for a uniform deposition.
Public/Granted literature
- US20210322934A1 GAS INJECTOR WITH BAFFLE Public/Granted day:2021-10-21
Information query
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