Invention Grant
- Patent Title: System for coating a substrate
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Application No.: US17514094Application Date: 2021-10-29
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Publication No.: US11532494B2Publication Date: 2022-12-20
- Inventor: Gary Hillman , Rajnish Tiwari , Robert D. Mohondro
- Applicant: Service Support Specialties, Inc.
- Applicant Address: US NJ Montville
- Assignee: Service Support Specialties, Inc.
- Current Assignee: Service Support Specialties, Inc.
- Current Assignee Address: US NJ Montville
- Agency: The Belles Group, P.C.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/02 ; H01L21/205 ; G03F7/16 ; B05D1/00
Abstract:
A system and/or method for coating a substrate. The system may include a chuck for holding and rotating the substrate, a dispensing subsystem for dispensing a coating material onto the substrate, and a shield member. The shield member may be movable towards and away from the substrate during the coating procedure. The shield member may have an inverted funnel shape. The shield member may include a central chamber through which a solvent vapor flows and a peripheral chamber that is fluidly separated from the central chamber through which a gas flows. During a coating procedure, the shield member may be moved very close to the substrate and the solvent vapor and gas may flow onto the substrate to create a solvent rich ambient around the substrate and prevent aerosols of the coating material from redepositing onto the substrate after being flung off due to spinning of the substrate.
Public/Granted literature
- US20220148889A1 METHOD AND/OR SYSTEM FOR COATING A SUBSTRATE Public/Granted day:2022-05-12
Information query
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