Invention Grant
- Patent Title: Theta stage mechanism and electron beam inspection apparatus
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Application No.: US17446188Application Date: 2021-08-27
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Publication No.: US11538658B2Publication Date: 2022-12-27
- Inventor: Takahiro Murata , Toshikatsu Akiba , Yoshihiro Izumi
- Applicant: NuFlare Technology, Inc.
- Applicant Address: JP Yokohama
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Yokohama
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2020-148731 20200904
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/28 ; G01N23/2251

Abstract:
According to one aspect of the present invention, a θ stage mechanism includes a fixed shaft; a plurality of bearings in which outer rings roll on an outer peripheral surface of the fixed shaft; a plurality of cylindrical members supported in a state of being inserted inside inner rings of the plurality of bearings; and a table that is arranged on the plurality of cylindrical members and moves in a rotational direction about a center of the fixed shaft by the plurality of bearings rolling on an outer peripheral surface of the fixed shaft.
Public/Granted literature
- US20220076916A1 THETA STAGE MECHANISM AND ELECTRON BEAM INSPECTION APPARATUS Public/Granted day:2022-03-10
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